Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1678485 | Ultramicroscopy | 2006 | 6 Pages |
Abstract
A lensless image of the surface of a crystal is obtained by the reflection on this surface of a low-energy electron beam originated from a point source integrated in a coaxial structure. The point source is a sharp field emission tip and a free propagation of reflected electrons results from the shielding of the tip voltage provided by the coaxial structure. Images are obtained for an incidence angle between 3 and 45° and for nA incident currents with a kinetic energy down to 40 V. On silicon surfaces a magnification up to a few thousands and a spatial resolution of 100 nm are demonstrated.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Zoubida Hammadi, Roger Morin,