Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1678582 | Ultramicroscopy | 2006 | 11 Pages |
Abstract
A method for the measurement of third-order spherical aberration coefficients (Cs)(Cs) is suggested, using low-order zone-axis Ronchigrams of a crystalline material. The validity of the method is confirmed using simulated and experimental Ronchigrams taken with various probe-forming lens configurations. The precision of the measured CsCs value is drastically improved compared with that obtained from the power spectrum-analysis method. In addition, a method for roughly estimating defocus values is presented.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Takashi Yamazaki, Yasutoshi Kotaka, Yoshio Kikuchi, Kazuto Watanabe,