Article ID Journal Published Year Pages File Type
1678582 Ultramicroscopy 2006 11 Pages PDF
Abstract

A method for the measurement of third-order spherical aberration coefficients (Cs)(Cs) is suggested, using low-order zone-axis Ronchigrams of a crystalline material. The validity of the method is confirmed using simulated and experimental Ronchigrams taken with various probe-forming lens configurations. The precision of the measured CsCs value is drastically improved compared with that obtained from the power spectrum-analysis method. In addition, a method for roughly estimating defocus values is presented.

Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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