Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1678631 | Ultramicroscopy | 2007 | 7 Pages |
Abstract
In this study, we present an uncooled infrared imaging detector using knife-edge filter optical readout method. The tilt angle change of each cantilever in a focal plane array (FPA) can be simultaneously detected with a resolution of 10−5°. A deformation magnifying substrate-free microcantilever unit is specially designed. The multi-fold legs of microcantilever are interval metal coated to form a thermal deformation magnifying structure. Thermal and thermomechanical performance of this microcantilever unit are modeled and analyzed. An FPA with 100×100 pixels is fabricated and thermal images of human body are obtained by this detector.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Zhengyu Miao, Qingchuan Zhang, Dapeng Chen, Zheying Guo, Fengliang Dong, Zhiming Xiong, Xiaoping Wu, Chaobo Li, Binbin Jiao,