| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1678656 | Ultramicroscopy | 2008 | 5 Pages |
Abstract
A compact and easy-to-use wavelength dispersive X-ray spectrometer using a multi-capillary X-ray lens attached to a scanning (transmission) electron microscope has been tested for thin-film analysis. B–K spectra from thin-film boron compounds (B4C, h-BN, and B2O3) samples showed prominent peak shifts and detailed structural differences. Mapping images of a thin W/Si double-layer sample resolved each element clearly. Additionally, a thin SiO2 film grown on a Si substrate was imaged with O–K X-rays. Energy and spatial resolution of the system is also discussed.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Miyoko Tanaka, Masaki Takeguchi, Kazuo Furuya,