Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1678716 | Ultramicroscopy | 2006 | 8 Pages |
Abstract
Energy filtered TEM, EFTEM, provides three-dimensional data, two spatial and one spectral dimension. We propose to acquire these data by measuring a series of images with a defocused energy filter. It will be shown that each image is a projection of the data on the detector and that reconstruction of the data out of a sufficient number of such projections using a tomographic reconstruction algorithm is possible. This technique uses only a fraction of the electron dose an energy filtered series (EFS) needs for the same spectral and spatial resolution and the same mean signal-to-noise ratio.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
W. Van den Broek, J. Verbeeck, S. De Backer, P. Scheunders, D. Schryvers,