Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1678834 | Ultramicroscopy | 2007 | 5 Pages |
Abstract
Normally, very complicated lithographically manufactured structures for tip characterization are used. In contrast, the structures shown in this work are very simple. For measuring the tip geometry very thin foils patterned by focused ion beam (FIB) were used. In this work we demonstrate the possibility of determining the AFM tip geometry and the tilt based on several different large structures. A proven algorithm was developed for the reconstruction of the tips. The shape of FIB-structured foils was determined by electron microscopy prior to AFM measurements. This new method for determining tip shape is also presented as it compares to other current methods. In this case a discussion on the stability and advantages of the new method is presented.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
T. Machleidt, K.-H. Franke, H. Romanus, V. Cimalla, M. Niebelschütz, L. SpieÃ, O. Ambacher,