Article ID Journal Published Year Pages File Type
1678837 Ultramicroscopy 2007 6 Pages PDF
Abstract
Hydrodynamic predictions of fluid velocity and pressure distribution are made for fluid in a confined space bounded by a vibrating microcantilever and a fixed surface. The results are used to quantify damping factors and predict frequency response amplitudes of a microcantilever vibrating near a fixed surface. The theoretical predictions of vibration response compare favorably with experimental data.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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