Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1678849 | Ultramicroscopy | 2009 | 6 Pages |
Abstract
Nano-sized textures resulted from localized electrochemical oxidation by using atomic force microscopy (AFM) were fabricated on H-passivated Si surface. In this paper, the fabrication and nanotribological properties of nanotexture by local anodic oxidation (LAO) on H-passivated Si surface are presented. A special attention is paid to find the relation between the size of oxide nanotexture and operational parameters such as tip-sample pulsed bias voltage, pulsewidth, and relative humidity to fabricate oxide nanotexture. The nanotribological properties were investigated by a colloidal probe. The results indicate that the nanotextures exhibited low adhesion and greatly reduced friction force at nanometer scale.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Yufei Mo, Wenjie Zhao, Deming Huang, Fei Zhao, Mingwu Bai,