A Micro-positioning Parallel Mechanism Platform with 100-degree Tilting Capability

This paper presents a micro-positioning platform based on the unique parallel mechanism recently developed by the authors. The platform has a meso-scale rectangular shape whose size is 20 × 23 mm. The stroke is 5 mm for both the x- and y-axis and 100 degrees for the α-axis (the rotational axis along the x-axis). The platform is actuated by the three sets of two-stage linear actuators: a linear motor for rough positioning and a piezo actuator for fine positioning. The platform is already assembled. The detailed design issues, including the kinematic analysis, and the experimental results of the positioning measurements and control performance, are presented.