Article ID Journal Published Year Pages File Type
1679752 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2016 5 Pages PDF
Abstract

Damage formation in ion implanted LiNbO3 was studied by Rutherford backscattering spectrometry (RBS) along various directions of the LiNbO3 crystal. From the results obtained it can be unambiguously concluded that Nb atoms being displaced during ion implantation preferably occupy the free octahedron sites of the LiNbO3 lattice structure and most likely also form NbLi antisite defects.

Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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