Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1679834 | CIRP Journal of Manufacturing Science and Technology | 2013 | 9 Pages |
Abstract
A compact contactless planar positioning stage is introduced which is based on a new fluid-dynamic drive principle. A defined thrust force generation is obtained by the controlled injection of free fluid jets on periodic structures that are part of the slide. Aerostatic bearings ensure a constant air gap independent of the load case. Following the background and goals of the project, the operating principle is explained. The design of a first linear prototype is supported by analytic and numerical analyses (CFD). Experimental results show a high capability for precision applications. Finally, a concept for a planar stage is introduced.
Related Topics
Physical Sciences and Engineering
Engineering
Industrial and Manufacturing Engineering
Authors
B. Denkena, H.-C. Möhring, H. Kayapinar,