Article ID Journal Published Year Pages File Type
1680231 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2015 4 Pages PDF
Abstract

Elastic properties of sub-stoichiometric nitrogen implanted silicon were measured with nanometer-resolution using contact resonance atomic force microscopy (CR-AFM) as function of ion fluence and post-annealing conditions. The determined range of indentation moduli was between 100 and 180 GPa depending on the annealing duration and nitrogen content. The high indentation moduli can be explained by formation of Si–N bonds, as verified by X-ray photoelectron spectroscopy.

Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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