Article ID Journal Published Year Pages File Type
1680342 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2015 9 Pages PDF
Abstract

Basic requirement for ion microprobes with sub-μm beam focus is a high brightness beam to fill the small phase space usually accepted by the ion microprobe with enough ion current for the desired application.We performed beam transport simulations to optimize beam brightness transported through the Munich tandem accelerator. This was done under the constraint of a maximum ion current of 10 μA that is allowed to be injected due to radiation safety regulations and beam power constrains. The main influence of the stripper foil in conjunction with intrinsic astigmatism in the beam transport on beam brightness is discussed.The calculations show possibilities for brightness enhancement by using astigmatism corrections and asymmetric filling of the phase space volume in the x- and y-direction.

Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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