Article ID Journal Published Year Pages File Type
1680801 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2014 5 Pages PDF
Abstract
Steady state surface conditions are obtained at a total cumulative nitrogen fluence of ∼80 × 1016 N atoms per cm2. In dynamic equilibrium, the interaction is marked by continuous surface erosion. In this case, the observed total sputtering yield becomes independent from the applied nitrogen fluence and is of the order of 0.4 beryllium atoms per impinging nitrogen atom.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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