Article ID Journal Published Year Pages File Type
1680803 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2014 7 Pages PDF
Abstract
In the last two decades the mathematical tools for quantitative data evaluation have been developed for several surface spectroscopic techniques like Angular Resolved X-ray Photoelectron Spectroscopy (ARXPS), Neutral Impact Collision Ion Scattering Spectroscopy (NICISS) and Metastable Induced Electron Spectroscopy (MIES). Provided that the experimental data are of good quality, quantitative data processing can add a lot to the information that can be gained from surface spectroscopy. We give a selection of references that contain information on these methods. The emphasis of this contribution aims at providing motivation to apply quantitative data evaluation by presenting a few examples. We try to demonstrate, that careful data evaluation may lead to interesting insight into basic concepts as well as to results that are useful for practical applications.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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