| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1680877 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2014 | 6 Pages |
Abstract
The combination of Time-of-flight Secondary Ion Mass Spectrometry (ToF-SIMS) and Scanning Force Microscopy (SFM) allows the 3D-compositional analysis of samples or devices. Typically, the topographical data obtained by SFM is used to determine the initial sample topography and the absolute depth of the ToF-SIMS analysis. Here ToF-SIMS and SFM data sets obtained on 2 prototypical samples are explored to go beyond conventional 3D-compositional analysis. SFM topographical and material contrast maps are combined with ToF-SIMS retrospective analysis to detect features that would have escaped a conventional ToF-SIMS data analysis. In addition, SFM data is used to extrapolate the chemical information beyond the spatial resolution of ToF-SIMS, allowing the mapping of the chemical composition at the nanoscale.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Laetitia Bernard, Jakob Heier, Wolfgang Paul, Hans J. Hug,