Analytical solution for depth scale calculations in Rutherford backscattering spectrometry

An analytic approximation is presented that allows a straightforward calculation of impurity concentration depth profiles from a measured Rutherford backscattering spectrum. The depth scale calculations consider energy-dependent stopping power data. Calculation of the concentration assumes Rutherford cross sections including electron screening effects. The solution for the depth scale has been verified to be within 2% of the exact numerical solution in the energy range down to 20% of the incident energy. The experimental depth profiles obtained for Au in Al and Ir in Si using MeV 12C12C projectile ions show good agreement with the present approximation.