Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1680916 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2012 | 4 Pages |
Abstract
The planar waveguides were formed in magnesium doped stoichiometric LiNbO3 crystals by means of 4.5Â MeV oxygen ion implantations at different fluences. The dark mode spectra were measured by the prism coupling method. The annealing behaviors of the formed waveguides were characterized by a series of annealing treatments. The Rutherford backscattering/channeling technique was used to investigate the damage produced by the ion implantation.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Lei Wang, Bing-Xi Xiang,