| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1680932 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2012 | 5 Pages |
Abstract
Periodic structures known as sputter ripples have been produced on many surfaces but many aspects of their formation are not understood. We have developed Kinetic Monte Carlo (KMC) simulations to model ripple formation based on the same sputtering and diffusion processes found in a widely-used continuum model. In the current work, we extend the simulations to include the effects of multiple defect production and barriers to interlayer diffusion to determine if these can account for experimental measurements which find more rapid ripple growth than predicted theoretically.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Yohei Ishii, Wai Lun Chan, Eric Chason,