| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1680935 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2012 | 4 Pages |
Abstract
In this paper, we discuss how ion-beam techniques can be used to accurately direct the self-assembly of metallic nanostructures. Fabrication of micrometer-scale three-dimensional cubes (boxes) is demonstrated. The milling by ion-beam locally modifies the thickness of the film and its structures such as grains boundaries, film surface, and film/vacuum interface. The local manipulation can be done according to a design, either at once (parallel), or in a sequence within an electron/ion (SEM/FIB) dual-beam microscope.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
K. Chalapat, N. Chekurov, J. Li, G.S. Paraoanu,