Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1680988 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2014 | 6 Pages |
Abstract
The structure of single crystal α-Al2O3 irradiated with 175 keV zirconium ions to fluences of 7.5 Ã 1015 and 1.5 Ã 1016 Zr/cm2 at room temperature, was investigated using Rutherford backscattering spectroscopy with ion channeling (RBS-C) and transmission electron microscopy (TEM). A buried amorphous layer was observed in samples irradiated at room temperature to a fluence of 1.5 Ã 1016 Zr+/cm2 (175 keV). The buried amorphous region is sandwiched between two highly-damaged crystalline regions. Nano-beam electron diffraction confirmed that both the near-surface damaged layer and the deeper damaged layer remained crystalline, but the buried amorphous region is lacking in long-range atomic order. Post irradiation using 55 keV oxygen ions at room temperature into pre-Zr-implanted samples produced ion beam-induced epitaxial crystallization (IBIEC) of the amorphous region adjacent to the near-surface damaged layer. Growth of the metastable polymorph γ-Al2O3 was observed at the amorphous/near surface damaged crystalline interface, as a result of this oxygen ion irradiation.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Younes Sina, Manabu Ishimaru, Carl J. McHargue, Eduardo Alves, Kurt E. Sickafus,