| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1681077 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2014 | 4 Pages |
Abstract
The influence of the bombardment by the Ar+, Ba+ and Na+ ions and the subsequent annealing on composition and electron structure of a surface of the CaF2/Si (1 1 1) films is studied. The energy band diagram of the epitaxial nanofilm systems of the Ca–CaF2–Si type is constructed. Optimum regimes of ion implantation and annealing for the production of three-componental nanodimensional structures of the Ca1−XМеXF2 type are determined and parameters of their energy bands are estimated.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
B.E. Umirzakov, D.A. Tashmukhamedova, M.K. Ruzibaeva, F.G. Djurabekova, S.B. Danaev,