Article ID Journal Published Year Pages File Type
1681146 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2014 5 Pages PDF
Abstract

Nanometre-smooth diamond-like carbon coatings (DLC) were produced at room temperature with ion implantation using 6 kV C3Hy+ ion beams. Ion beam analysis measurements showed that the coatings contain no heavy Z impurities at the level of 100 ppm, have a homogeneous stoichiometry in depth and a hydrogen concentration of typically 25 at.%. High resolution TEM analysis showed high quality and atomically flat amorphous coatings on wafer silicon. Combined TEM and RBS analysis gave a coating density of 3.25 g cm−3. Raman spectroscopy was performed to probe for sp2/sp3 bonds in the coatings. The results indicate that low energy ion implantation with 6 kV produces hydrogenated amorphous carbon coatings with a sp3 content of about 20%. Results highlight the opportunity of developing room temperature DLC coatings with ion beam technology for industrial applications.

Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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