Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1681418 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2010 | 4 Pages |
Abstract
The optical changes in amorphous WO3 film prepared by reactive RF sputtering and irradiated by 200-800Â keV oxygen ions were measured to study the relationship between coloration and energy deposition. The color centers were effectively created by ion irradiation with contributions from nuclear collisions and electronic energy loss. The increase in the absorption coefficient was reasonably explained by a first order reaction, whose production rate depended roughly on the total deposited energy. During heat treatment in air atmosphere, transmittance recovery started at 400Â K and completed at 550Â K. No significant difference was found among films irradiated by different incident energies; therefore indicating that the ion-induced damage structure is not strongly influenced by the type of energy loss.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
S. Nagata, H. Fujita, A. Inouye, S. Yamamoto, B. Tsuchiya, T. Shikama,