| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1681590 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2016 | 5 Pages |
Crater-like defects formations with gas cluster ion beams (GCIB) were used as templates for carbon nanotube (CNT) growth. Upon a gas cluster ion impact, dense energy is deposited on a target surface while energy/atom of gas cluster ion is low, which creates crater-like defects. Si and SiO2 were irradiated with Ar-GCIB, subsequently CNTs were grown with an alcohol catalytic CVD using Co and ethanol as catalyst and precursor, respectively. From SEM, AFM and Raman spectroscopy, it was shown that growth of CNT with small diameter was observed on SiO2 with Ar-GCIB irradiation. On Si targets, formation of craters with bottom oxide prevented Co diffusion during CNT growth, as a result, CNT growth was observed only on Si irradiated with high-energy Ar-GCIB. These results showed that isolated defects created by GCIB can be used as templates for nanotube growth.
