| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1681596 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2016 | 6 Pages |
Abstract
After chemical etching, the quality of the bottom and side walls of the produced structures in PMMA were analyzed using Scanning Transmission Ion Microscopy (STIM).
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
M. Cutroneo, V. Havranek, A. Mackova, V. Semian, L. Torrisi, L. Calcagno,