Article ID Journal Published Year Pages File Type
1681655 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2010 7 Pages PDF
Abstract
An approach using optical data to simulate both the bremsstrahlung continuum and characteristic K and L X-ray lines generated by low energy electrons (cfr. electron microscopy) in solids is discussed in this paper. The necessary analytical expressions together with the data to calculate the relevant cross sections for elastic and inelastic interactions at these energies along with variance reduction techniques are given. The results of the Monte Carlo simulation are compared to experimental data measured with a JEOL 6300 electron microscope.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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