Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1681901 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2012 | 4 Pages |
Abstract
A z-cut LiNbO3 crystal was immersed in a molten benzoic acid for 10Â min and then was implanted with 6-MeV oxygen ions at a fluence of 6Â ÃÂ 1014 ions/cm2. Lattice damage in this crystal was measured by a Rutherford backscattering and channeling technique and was compared with lattice damage in a proton-exchanged LiNbO3 crystal and an oxygen-ion-implanted LiNbO3 crystal. A totally amorphous layer was formed at the crystal's surface after both proton exchange and oxygen-ion implantation processes were performed, even though either process alone never led to a relative disorder of the lattice up to 0.2. It indicates that the crystal lattice in the proton-exchanged layer is unstable and can be easily damaged by ion implantation subsequently. The waveguide structure formed by proton exchange was destroyed by oxygen-ion implantation. Oxygen-ion implantation induced an increase in extraordinary refractive index and formed another waveguide structure underneath the amorphous surface layer.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Qing Huang, Peng Liu, Tao Liu, Sha-Sha Guo, Lian Zhang, Xue-Lin Wang,