| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1682004 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2013 | 4 Pages |
Abstract
Lateral ordered Co, Pt and Co/Pt nanostructures were fabricated in SiO2 and Si3N4 substrates by high fluence metal ion implantation through periodic nanochannel membrane masks based on anodic aluminium oxides (AAO). The quality of nanopatterning transfer defined by various AAO masks in different substrates was examined by transmission electron microscopy (TEM) in both imaging and spectroscopy modes.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Wei Guan, Nianhua Peng, Christopher Jeynes, Jay Ghatak, Yong Peng, Ian M. Ross, Umananda M. Bhatta, Beverley J. Inkson, Günter Möbus,