Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1682039 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2013 | 4 Pages |
Abstract
In this letter, we report on the fabrication of planar optical waveguide in stoichiometric lithium niobate by four-low-energy Helium ion implantation with relative low doses. The simulated refractive index profile reveals that the index-raised well exists in the near-surface ion implanted region. There are dark modes with positive changes of effective refractive indices measured by the prism coupling technique both at 633 and 1539Â nm after annealing. Further, the small and homogenous damage depth profile proves that there should be the refractive index with positive change. Large energy of the modes is confined in the guiding region. The light was confined well in the waveguide by broad and homogenous index-raised region. Propagation loss for extraordinary refractive index is estimated to be â¼1.2Â dB/cm.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Shao-Mei Zhang, Lu-Tong Cai, Qi-Xin Liu, Xiu-Hong Liu, Xian-Bing Ming,