| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1682137 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2012 | 4 Pages |
Abstract
⺠Cd ion implanted in AlN thin films. ⺠XRD shows damage produced during implantation. ⺠Annealing recovers damage in low fluence sample. ⺠RBS/C measurements show that Cd occupies substitutional sites. ⺠Cd can be a good candidate for p-type doping.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
S.M.C. Miranda, N. Franco, E. Alves, K. Lorenz,