| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1682508 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2011 | 4 Pages |
Abstract
We present a method to produce stable proton and helium ion beams with energies of 10-100Â keV from a 30-year-old Van De Graaff accelerator using an external stabilized DC voltage supply instead of the belt charging system. Requiring no other modifications, this makes an ideal system for ion irradiation with fluences up to 1015Â ions/cm2. Such ion energies and fluences are required in the emerging fields such as silicon micromachining using ion irradiation and we give examples of structures created with sizes as small as 200Â nm.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
T.K. Chan, J. Song, T.F. Choo, M.B.H. Breese,