Article ID Journal Published Year Pages File Type
1682510 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2011 6 Pages PDF
Abstract

The effect of annealing on defects and the formation of Xe bubbles were investigated in zirconium oxycarbide implanted with 800-keV136Xe2+ ions at two fluences 1 × 1015 and 1 × 1016 Xe/cm2. Doppler broadening technique combined with slow positron beam was used. The analysis of the S depth profiles and S–W maps revealed that in the as-implanted samples at both fluences Xe bubbles are not formed. The post-implantation annealing of the samples implanted at 1 × 1016 Xe/cm2 caused formation of Xe bubbles. The response of the lower implantation dose samples to this post implantation annealing was found rather complicated and is discussed.

Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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