Planar channeling in wurtzite structured ZnO (0Â 0Â 0Â 1): Anisotropic effects due to the non-centrosymmetric structure

Simulated and experimental channeling angular scans across the plane show a significant asymmetry prominently at the shoulder region at near-surface depths. Considering the variation of ion flux distribution with respect to the angle of incidence, we observe that the shoulder region is a result of superposition of the primary flux super focus with the atomic planes; the asymmetry is a result of the difference of ion flux density at Zn (or O) atomic planes at the two angles that correspond to shoulders caused by flux masking by O (or Zn) planes. Therefore, the interaction of channeling super focus with atomic planes and the ratio of shoulders can conversely be used in determining the crystallographic polarity, and in general analysis involving determining the stacking sequence of atomic planes.