Article ID Journal Published Year Pages File Type
1682734 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2009 5 Pages PDF
Abstract
A Monte Carlo simulation technique is used to investigate electron transport in N2O in crossed RF electric and magnetic fields. Our work has resulted in a database of transport parameters which can be used for correct implementation in modeling RF discharges. A behavior of transport coefficients under the influence of the magnitude and the frequency of the fields was studied separately revealing some complex features in the time dependence, most notably anomalous anisotropic diffusion and time-resolved negative differential conductivity.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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