Article ID Journal Published Year Pages File Type
1683250 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2008 4 Pages PDF
Abstract

Channeling Rutherford backscattering spectrometry (RBS) has been widely used to quantitatively analyze displacements in monocrystalline solid state thin films. Its accuracy, however, relies on the approach of separating yields contributed by channeled components and by dechanneled components. In this study, efforts have been made to increase accuracy through three major approaches: first, we have considered the stopping power difference between channeled and non-channeled components; second, we have proposed a mathematical formula to describe a smooth transition from single scattering to multiple scattering in describing dechanneling of analyzing beams as a function of displacements; third, we have used an iterative approach to extract yields from dechanneling components without using any predetermined dechanneling cross sections. These novel approaches are expected to increase accuracy in channeling RBS analysis.

Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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