| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1683278 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2014 | 5 Pages |
Abstract
The confocal technology based on a polycapillary focusing X-ray lens in the excitation channel and a polycapillary parallel X-ray lens in the detection channel was used to perform three-dimensional energy dispersive X-ray diffraction scanning analysis of a copper film on a silicon substrate. A theoretical model of correcting the intensity of the diffracted X-rays from different parts of the sample in the confocal volume was designed. The point-to-point 3D diffraction information of the sample was obtained.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Tianxi Sun, Hehe Liu, Zhiguo Liu, Song Peng, Yongzhong Ma, Weiyuan Sun, Ping Luo, Xunliang Ding,