Article ID Journal Published Year Pages File Type
1683919 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2009 4 Pages PDF
Abstract
The damage accumulation in 6H-SiC bombarded at room temperature with 1.3 keV/amu atomic P+ ions and small cluster ions PFn+ (n = 2 and 4) have been studied by Rutherford backscattering spectrometry in channeling mode. Results show that collision cascade density strongly affects damage buildup in SiC. The cluster ion bombardment of SiC produces more stable defects both near the surface and in the region between the surface and bulk defect peaks than irradiation by atomic ions.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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