Article ID Journal Published Year Pages File Type
1683931 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2009 4 Pages PDF
Abstract
The chemical bonds between carbon and nitrogen were studied as a function of depth by X-ray photoelectron spectroscopy (XPS). The C 1s and N 1s core level photoelectron spectra revealed the presence of different types of C-N bonds, which correspond to specific kinds of chemical states. These results indicate that different carbon nitride compounds have been formed during the implantation.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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