Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1683931 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2009 | 4 Pages |
Abstract
The chemical bonds between carbon and nitrogen were studied as a function of depth by X-ray photoelectron spectroscopy (XPS). The C 1s and N 1s core level photoelectron spectra revealed the presence of different types of C-N bonds, which correspond to specific kinds of chemical states. These results indicate that different carbon nitride compounds have been formed during the implantation.
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Authors
J.L. Colaux, P. Louette, G. Terwagne,