Comparison of secondary electron emission in helium ion microscope with gallium ion and electron microscopes

To evaluate secondary electron (SE) image characteristics in helium ion microscope, Si surfaces with a rod and step structures is scanned by 30 keV He and Ga ion beams and 1 keV electron beam. The topographic sensitivity of He ions is in principle higher than that for scanning electron microscope (SEM) because of the stronger dependency of SE yield versus incident angle for He ions. As shrinking to sub nm patterns, the pseudo-images constructed from line profile of SE intensity by the electron beam lose their sharpness, however, the images for the He and Ga ion beams keep clearness due to darkening the bottom corners of the pattern. Here, the sputter erosion for Ga ions must be considered. Furthermore, trajectories of emitted SEs are simulated for a rectangular Al surface scanned by the beams to study voltage contrast, where positive and negative voltages are applied to the small area of the sample. Both less high energy component in the energy distribution of SEs and dominant contribution of direct SE excitation by a projectile He ion keep a high voltage contrast down to a sub nm sized area positively biased against the zero-potential surroundings.