Article ID Journal Published Year Pages File Type
1684306 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2006 4 Pages PDF
Abstract

Nanosized ripples are formed on Al thin films by oblique angle low energy O2+ ion beam sputtering. Conductive atomic force microscopy (C-AFM) shows that the ripples are composed of periodically spaced thin insulating layers on the metal substrate.

Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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