Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1684403 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2007 | 4 Pages |
Abstract
Low background alpha-particle (α) counting is required in the semiconductor industry, where α’s produce single event errors. Industry road maps call for measuring α emissivities at 0.0005 α/cm2/h, while current commercial counter backgrounds are 0.005 α/cm2/h, a factor of 10 too high. This paper shows that by designing an ionization chamber so that ionization tracks collected from the sample have long risetimes while those collected from the anode have short risetimes, signal risetime analysis can distinguish α emanation location within the counter. Coupled with a guard electrode to reject tracks emitted from the counter sidewalls, the method can achieve backgrounds approaching 0.0001 α/cm2/h, a factor of 20 lower.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
W.K. Warburton, B. Dwyer-McNally,