| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1684827 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2008 | 6 Pages |
Abstract
Enhanced diamond-like carbon (DLC) multilayer films were produced by a method of alternating the magnetic filtered vacuum cathode arc deposition and the metal vapor vacuum arc (MEVVA) implantation of Ni+ ions. The microstructure and mechanical properties of these multilayer films were studied by XPS, Raman, SEM, AFM, XRD, nano-intender and internal stress measurement. The results reveal that with the increasing dose of implanted Ni+ ions, the sp3 contents are declining and reduction of the nanohardness and release of the internal stress are observed.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Lizhao Qin, Zhenglong Wu, Xu Zhang, Andong Liu, Bin Liao, Jie Deng,