| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1684975 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2007 | 5 Pages |
Abstract
Irradiation of a bilayer consisting of a deuterated silicon nitride and a silicon sub-oxide film with heavy ions in the electronic stopping regime results in incorporation of nitrogen and deuterium in the sub-oxides. This experimental observation is discussed within the model, originally established to understand the loss of hydrogen from hydrogenated organic and inorganic materials. This and other reported observations of transport within the bilayer emphasize the role of trapping and permeation in the model.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
W.M. Arnoldbik, F.H.P.M. Habraken,