| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1684988 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2007 | 5 Pages |
Abstract
The dependences of sputtering yield Y of highly oriented pyrolytic graphite under high fluences (1018–1019 ion/cm2) 30 keV N2+ irradiation at ion incidence angles from θ = 0 (normal incidence) to θ = 80° at room temperature (RT) and T = 400 °C have been measured to trace the radiation damage influence on angular behavior of sputtering yield. A difference has been found between angular dependences of sputtering yields at RT, when the irradiation leads to a high degree of disorder, and at temperatures, larger than the temperature Ta responsible for annealing the radiation damage at continuous ion bombardment.
Keywords
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Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
A.M. Borisov, E.S. Mashkova, A.S. Nemov, Yu.S. Virgiliev,