Article ID Journal Published Year Pages File Type
1685147 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2008 4 Pages PDF
Abstract

We have studied the angular distribution of 120 MeV Au ion beam induced sputtering yield for three cases: from crystalline highly oriented pyrolytic graphite (HOPG) for (A) normal and (B) 70° incidence and from (C) amorphous carbon sample for normal incidence. An anisotropic distribution of sputtering is observed for HOPG samples studied with a distribution Y = Acosnθ + Bexp[−(θ − μ)2σ2]. Though the over-cosine function dependence is observed for all the cases, the anomalous peak observed at 53° for normal incidence for HOPG sample is found to shift to 73° when the sample is tilted by 20°. No peak is observed in the amorphous carbon sample which further confirms that the anisotropy observed is due to the crystal structure and formation of a pressure pulse. The high exponent of over-cosine distribution of sputtering yield (n = 3.2–3.8) signifies formation of intense pressure pulse induced jet like sputtering.

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Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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