Article ID Journal Published Year Pages File Type
1685161 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2008 5 Pages PDF
Abstract

The International Atomic Energy Agency has sponsored a formal intercomparison exercise for the seven depth profiling ion beam analysis codes, which are: GISA, RUMP, RBX, DEPTH, DataFurnace, SIMNRA and MCERD. This intercomparison is published in Nucl. Instr. and Meth. B [N.P. Barradas, K. Arstila, G. Battistig, M. Bianconi, N. Dytlewski, C. Jeynes, E. Kótai, G. Lulli, M. Mayer, E. Rauhala, E. Szilágyi, M. Thompson, Nucl. Instr. and Meth. B 262 (2007) 281–303] and summarised here. The codes implement all known physical effects and they are all evaluated. We demonstrate that there is agreement between codes often better than 0.1%; and also detailed agreement with real spectra, showing in particular that the SRIM 2003 stopping powers for Si are correct to 0.6% for 1.5 MeV He. For the case of heavy ion elastic recoil detection (HI-ERD) the single scattering codes performed poorly for scattered particles, although recoiled particles were calculated correctly.

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Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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