| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1685324 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2008 | 9 Pages |
Abstract
The complex magnetic field of the permanent magnet electron cyclotron resonance (ECR) ion source MEFISTO located at the University of Berne has been numerically simulated. For the first time the magnetized volume qualified for electron cyclotron resonance at 2.45Â GHz and 87.5Â mT has been analyzed in highly detailed 3D simulations with unprecedented resolution. New results were obtained from the numerical simulation of 25,211 electron trajectories. The evident characteristic ion sputtering trident of hexapole confined ECR ion sources has been identified with the field and electron trajectory distribution. Furthermore, unexpected long electron trajectory lifetimes were found.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
M. Bodendorfer, K. Altwegg, H. Shea, P. Wurz,
