ECR plasma assisted deposition of zinc nanowires

Deposits of one dimensional nanowires of zinc with diameters of 90-120 nm have been obtained by means of dc sputtering within an electron cyclotron resonance plasma reactor. The sputtering has been made effective by using a negatively biased cylindrical target. The structure of the nanocrystalline wires deposited on glass substrates were investigated with scanning electron microscopy, transmission electron microscopy and scanning tunneling microscopy. STM revealed that the structure of the one dimensional nanowires are ensemble of nanoclusters and nanowires with diameter of 4-5 nm. The crystalline nature of the metallic nanowires was studied with X-ray and electron diffraction analysis. The native oxide present on the metallic wires was revealed by photoluminescent spectroscopy. Theoretical modeling has been used to explain the possible mechanisms operative inside the plasma which lead into deposition of zinc on the substrate starting from the precursor species.