Article ID Journal Published Year Pages File Type
1685966 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2007 4 Pages PDF
Abstract
Recently Yamada et al. have been employing large gas cluster beams at relatively low energy per atomic particle so that the target material does not undergo such direct kinetic energy transfer. This relatively new technique - known as infusion doping in silicon technology - suggests a new, less damaging, technique for introducing dopants into nanostructured materials. Here we make an initial simulation study of the impact of a large gas cluster, containing a fraction of dopant ions, onto a single wall nanotube to investigate the possible doping and survival rate of this mechanism over the more conventional single atomic ion implantation technology.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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